Title:
FILTER APPARATUS AND RESIST COATING APPARATUS
Document Type and Number:
Japanese Patent JP2001155985
Kind Code:
A
Abstract:
To feed a constant volume of chemical liquid by completely excluding air bubbles in a filter apparatus, in which a constant volume of chemical liquid is introduced, filtered, and fed to other apparatus.
A valve disc 7, that closes a discharge opening for discharging chemical liquid containing air bubbles and remains in the filter apparatus, is provided. A valve seat 9 of the discharge opening is closed after the remaining chemical liquid with air bubbles is pushed out to the outside through the discharge pipe 5 in advance, and the chemical liquid in the housing 2 free of compressive air bubbles is sent out at a constant pressure.
Inventors:
YOSHIMOCHI KAZUYUKI
Application Number:
JP33402599A
Publication Date:
June 08, 2001
Filing Date:
November 25, 1999
Export Citation:
Assignee:
KYUSHU NIPPON ELECTRIC
International Classes:
H01L21/027; F16K24/04; G03F7/16; (IPC1-7): H01L21/027; F16K24/04; G03F7/16
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)
Previous Patent: PROCESSING SYSTEM FOR SUBSTRATE
Next Patent: ALIGNER, METHOD FOR FABRICATING DEVICE AND METHOD FOR ALIGNMENT
Next Patent: ALIGNER, METHOD FOR FABRICATING DEVICE AND METHOD FOR ALIGNMENT