Title:
FILTER FIXING MECHANISM, FILTER FIXING METHOD, AND HEAT-TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2007285688
Kind Code:
A
Abstract:
To provide a filter fixing mechanism needing no periodic fastening operation, and capable of suppressing generation of particles.
A space between an opening frame 1 for hot air passage and a heat resistant filter frame 5 is sealed by direct contact of the heat resistant filter frame 5 to the opening frame 1 for hot air passage. Since the opening frame 1 for hot air passage and the heat resistant filter frame 5 can be completely adhered to each other by comprising a fastening shaft 2 and the heat resistant filter frame 5 by materials with the same coefficient of thermal expansion, necessity of providing a seal member is eliminated.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
SAKONAKA KAZUHIRO
Application Number:
JP2006116882A
Publication Date:
November 01, 2007
Filing Date:
April 20, 2006
Export Citation:
Assignee:
ESPEC CORP
International Classes:
F27D7/06; B01D46/00; F27B5/16; F27D7/04
Domestic Patent References:
| JPS63189324A | 1988-08-04 | |||
| JP2003302078A | 2003-10-24 | |||
| JPH11253732A | 1999-09-21 | |||
| JPH0952012A | 1997-02-25 | |||
| JP2005249276A | 2005-09-15 | |||
| JP2000329472A | 2000-11-30 | |||
| JP2000070642A | 2000-03-07 | |||
| JP2004354010A | 2004-12-16 |
Attorney, Agent or Firm:
Kenzo Hara International Patent Office