Title:
FILTER MATERIAL FOR CLEANING HIGH PRESSURE GAS OF LOW DEW POINT, AND FILTER
Document Type and Number:
Japanese Patent JP2009165998
Kind Code:
A
Abstract:
To provide a filter capable of being regenerated even in a line that is used in a production process for a semiconductor or liquid crystal and can remove basic compounds such as ammonia contained as impurities in high pressure gases of a low dew point such as compressed air and a compressed inert gas without causing secondary pollution by the filter itself.
The filter is fabricated by loading a casing 1 with a filter material 2 containing as a component a solid acidic porous material selected from the group consisting of H-Y type zeolite, H-mordenite, H-ferrierite, H-ZSM-5, H-beta, Al-silicate, Ga-silicate, Fe-silicate, B-silicate, Al-MCM-41 and Ga-MCM-41, and used in a purge line of the high pressure gases of a low dew point.
Inventors:
Takahashi, Hideto
Application Number:
JP2008000009376
Publication Date:
July 30, 2009
Filing Date:
January 18, 2008
Export Citation:
Assignee:
TAKASAGO THERMAL ENG CO LTD
International Classes:
B01J20/18; B01D53/02; B01D53/04; B01J20/34
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