Title:
FILTER MEDIUM FOR CHEMICAL FILTER
Document Type and Number:
Japanese Patent JP2001252516
Kind Code:
A
Abstract:
To provide a filter medium for a chemical filter capable of substantially dispensing with preliminary operation.
The chemical filter is constituted of a filter medium containing a gas adsorbent and the moisture content of the filter medium is adjusted so as to become almost equal to equilibrium moisture content in the atmosphere of a clean room used as an air filter.
Inventors:
FUJIMURA YOICHI
ASADA YASUHIRO
ASADA YASUHIRO
Application Number:
JP2000067071A
Publication Date:
September 18, 2001
Filing Date:
March 10, 2000
Export Citation:
Assignee:
TORAY INDUSTRIES
International Classes:
B01D53/02; B01J20/20; B01J20/22; (IPC1-7): B01D53/02; B01J20/20; B01J20/22
Attorney, Agent or Firm:
Shinichi Ogawa (2 outside)