Title:
Filtration apparatus
Document Type and Number:
Japanese Patent JP6088360
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a filter that can treat large flux of treatment water containing removal objects such as silicon scraps and dehydrate the treatment water at a high level.SOLUTION: In a filter 10, a filter membrane 16 made of a rigid material such as ceramic is submerged in treatment water 34 stored in a treatment tank 14. A predetermined suction pressure is applied to the internal space of the filter membrane 16 by a pump 24 to stack a sedimentary layer 32 composed of removal objects on a filter surface 16A of the filter membrane 16 while filtering the treatment water 34 with the filter membrane 16. When the rate of filtered water is reduced, pressure is applied to the filter membrane 16 to peel the sedimentary layer 32 off the filter membrane and to deposit it at a lower part of the treatment tank 14.
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Inventors:
Hiroyuki Umezawa
Etsuji Tachiki
Etsuji Tachiki
Application Number:
JP2013117283A
Publication Date:
March 01, 2017
Filing Date:
June 03, 2013
Export Citation:
Assignee:
Panasonic Corporation
KABUSHIKI KAISHA MEIDENSHA
KABUSHIKI KAISHA MEIDENSHA
International Classes:
C02F1/44; B01D29/01; B01D29/66; B01D63/08; B01D65/02; B01D69/06; B01D69/14; B01D71/02; B24B55/12; H01L21/301; H01L21/304
Domestic Patent References:
| JP2011157226A | ||||
| JP2009072714A | ||||
| JP2003135940A | ||||
| JP2009526639A | ||||
| JP2010036180A | ||||
| JP5228347A |
Attorney, Agent or Firm:
Yoshitaka Okada
Takashi Okada
Takashi Okada