To suppress corrosion of an apparatus by making a recovered solvent alkaline upon film formation in a solution and to suppress inclusion of impurities in a film to be produced.
A volatile solvent generated in film formation is recovered and separated as a purified solvents 146 and 171 by extraction, etc., the purified solvents 146 and 171 are charged in a control tank 181, pH and a water content in a solvent 182 are measured, an acidic solution 207 and/or an alkaline solution 208 is added to the solvent 182 to adjust pH to a desired value, and a water content of the solvent 182 is adjusted to the desired level by passing the solvent 182 through a dehydration install 191, whereby pH and a water content of the solvent 182 are adjusted appropriately, and thus a film produced by using the solvent 182 is excellent in its optical characteristics.
COPYRIGHT: (C)2004,JPO
Yuji Suzuki
Sugiura Hide
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