To reduce the influence of elastic vibration in a stage, and to improve positioning control performance.

At least three movable element units are provided. In the movable element units, the movable elements of an actuator for generating thrust in a direction vertical to the surface of a top board, and an actuator for generating thrust in a direction horizontal to the top board, are integrated. As a result, the generation of the elastic vibration can be suppressed and hence the positioning control characteristics can be improved. Additionally, the movable element units are connected one another, thus further increasing stiffness and hence further improving the positioning control characteristics. In addition, a stator opposite to the movable element unit can also be integrated, thus reducing piping for cooling and electrical wiring member for making appropriate by use in vacuum. Since the number of components can be reduced, costs can be reduced, entire mass can be reduced, and size can be reduced.