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Title:
FINE CERAMIC STRUCTURE AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP2001048655
Kind Code:
A
Abstract:

To obtain a fine structure having a high aspect ratio by controlling the composition of a ceramic slurry, then filling the slurry into a resin mold having a fine pillar-shaped hole and removing the resin mold and firing after drying and solidifying.

The diameter of the pillar of the ceramic pillar-shaped structure is not more than 50 μm and the aspect ratio(height/diameter of the ceramic pillar) is not less than 4. The ratio of the volume of the ceramic powder in the composition of the ceramic slurry is preferably not less than 35 vol.%. It is made possible to fill the ceramic slurry up to the tip end of the hole of a resin mold having a deep hole by adding a plasticizer to the ceramic slurry. It is preferable to use, as a binder, a polyvinyl alcohol having a polymerization degree of 1,500 to 3,500 in the ceramic in a concentration of 5 to 20 vol.% in order to maintain the fine ceramic pillar-shaped structure.


Inventors:
NAKAMAE KAZUO
NUMAZAWA TOSHIYUKI
Application Number:
JP22727399A
Publication Date:
February 20, 2001
Filing Date:
August 11, 1999
Export Citation:
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Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
H04R17/00; B28B3/02; B28B7/34; B28B13/06; C04B35/00; C04B35/495; C04B35/622; H01L41/333; H01L41/39; H01L41/45; (IPC1-7): C04B35/622; B28B3/02; B28B7/34; C04B35/495; H01L41/24; H01L41/26
Attorney, Agent or Firm:
Fukami Hisaro (2 outside)