Title:
FINE DIMENSION MEASURING APPARATUS
Document Type and Number:
Japanese Patent JPS5289346
Kind Code:
A
Abstract:
PURPOSE: To provide a fine dimension measuring apparatus, in which fringe period of Fraunhofer's diffraction pattern is measured by the use of vidicon camera, whereby forms of IC mask or others and sizes of pin holes in film-like substance can be measured at a high speed.
Inventors:
SHINDOU YASUHIKO
KURODA MASAO
KURODA MASAO
Application Number:
JP494776A
Publication Date:
July 26, 1977
Filing Date:
January 21, 1976
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01B11/08; G01B11/06; (IPC1-7): G01B11/06
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