Title:
FINE MACHINING DEVICE AND FINE MACHINING METHOD
Document Type and Number:
Japanese Patent JP3879235
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a fine machining device which can efficiently use material and can be miniaturized.
SOLUTION: Fine machining is performed by locally applying fluid 100 used for fine machining to the work area of a work face 101 by means of an ink jet system(a), making a probe 1a contact with the fluid 100 applied to the work area (b) and supplying the probe 1a made to contact with the fluid 100 with voltage and light without wastefully spending fluid which is used as a machining medium.
Inventors:
Ide Tsuguo
Satoshi Nebashi
Masaya Ishida
Tatsuya Shimoda
Takanobu Toyama
Satoshi Nebashi
Masaya Ishida
Tatsuya Shimoda
Takanobu Toyama
Application Number:
JP6375998A
Publication Date:
February 07, 2007
Filing Date:
March 13, 1998
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B23H3/00; B41J2/01; C23C14/04; H01L21/302; H01L21/3065; H01L41/09; (IPC1-7): B23H3/00; C23C14/04; H01L41/09; //B41J2/01; H01L21/3065
Domestic Patent References:
| JP2061099A | ||||
| JP62174370U | ||||
| JP6297252A | ||||
| JP8257838A | ||||
| JP8060383A | ||||
| JP5288714A | ||||
| JP9267218A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Fujitsuna Hideyoshi
Kazuhiko Miyasaka
Fujitsuna Hideyoshi
Kazuhiko Miyasaka