Title:
発振回路が適用された微細質量測定装置及び方法
Document Type and Number:
Japanese Patent JP4155960
Kind Code:
B2
Abstract:
A micro mass measuring apparatus includes a cantilever on which a subject is attached, a piezoelectric element formed on the cantilever, an oscillation circuit for actively vibrating the cantilever and providing a varied resonance frequency by the subject, and a frequency measuring device for measuring a resonance frequency of the cantilever.
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Inventors:
Lee Mamoru
Kei Gen
Lee
Kei Gen
Lee
Application Number:
JP2004311053A
Publication Date:
September 24, 2008
Filing Date:
October 26, 2004
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO.,LTD.
International Classes:
G01N5/02; G01G3/16; G01L9/00; G01N27/00
Domestic Patent References:
| JP2002350218A | ||||
| JP2001056278A | ||||
| JP2002517745A | ||||
| JP2002543403A | ||||
| JP2161323A |
Attorney, Agent or Firm:
Mikio Hatta
Yasuo Nara
Katsuyuki Utani
Yasuo Nara
Katsuyuki Utani