PURPOSE: To provide read processing of reacting fine particles while in contact with a reaction gas on the way of feeding by providing a converging and diverging nozzle movable along a passage.
CONSTITUTION: A converging and diverging nozzle 1 is provided in a passage to be movable longitudinally. When a carrier gas in which fine particles are dispersed and floated is supplied into an upstream chamber 3 and a downstream chamber 4 is evacuated by a vacuum pump 5, a pressure difference is generated between the chambers 3 and 4. The gas including the supplied particles is fed from the chamber 3 through the nozzle 1 to the chamber 4. When the nozzle 1 is properly moved longitudinally at this time to check the film-forming state on a substrate on every time, the optimum conditions of the upstream and downstream chambers can be set and the optimum active seed can be readily regulated. The nozzle 1 can accelerate the flow of the fine particles by regulating the pressure ratio P/P0 of the pressure P0 of the chamber 3 to the pressure P of the chamber 4 and the ratio A/A* of the area A* of the hold of the throat 2 to the area A of the hole of the outlet 1b.
SUGATA MASAO
SUGATA HIROYUKI
DEN TORU
ANDO KENJI
KAMIYA OSAMU
