Title:
微粒子のハンドリング方法及び装置
Document Type and Number:
Japanese Patent JP4415139
Kind Code:
B2
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Inventors:
Jun Akiwatari
Lebedef Maxim
Sato Osamu
Lebedef Maxim
Sato Osamu
Application Number:
JP2002365780A
Publication Date:
February 17, 2010
Filing Date:
December 17, 2002
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
B01J19/00; B01J19/10; B01L3/00; B05C11/02; C23C24/04
Domestic Patent References:
| JP2001327917A | ||||
| JP9122480A | ||||
| JP7047259A |
Foreign References:
| WO2002034966A1 |