Title:
微細パターン形成方法
Document Type and Number:
Japanese Patent JP4893402
Kind Code:
B2
Inventors:
Takeshi Anbu
Hikaru Sugita
Hikaru Sugita
Application Number:
JP2007074839A
Publication Date:
March 07, 2012
Filing Date:
March 22, 2007
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/40; C08F12/24; C08F32/08; H01L21/027
Domestic Patent References:
| JP2004302216A | ||||
| JP2004093832A | ||||
| JP2004205699A |
Attorney, Agent or Firm:
Wake Manipulation