Title:
微細剣山製造方法
Document Type and Number:
Japanese Patent JP7306818
Kind Code:
B2
Abstract:
To provide a fine frog manufacturing method that can form fine frogs by forming multiple columns with pointed tips on a surface of a workpiece.SOLUTION: A fine frog manufacturing method of the present invention is constituted of at least an aspect ratio setting step of preparing a disc-shaped cutting blade 43 for cutting a workpiece 10 to be manufactured into frogs and including cutting blades on an outer circumference, and increasing an aspect ratio of an output amount of a cutting blade to a thickness T of the cutting blade 43 more than a predetermined aspect ratio; a first cutting step of rotating the cutting blade 43, making the tip of the cutting blade vibrate finely in a rotating shaft direction, forming multiple cutting grooves 94 at predetermined pitches in a first direction of the workpiece 10, and forming multiple walls with pointed tips; and a second cutting step of rotating the cutting blade, making the tip of the cutting blade vibrate finely in the rotating shaft direction, and cutting multiple walls at the predetermined pitches in a second direction perpendicular to the first direction, and forming multiple columns with the pointed tips.SELECTED DRAWING: Figure 9
Inventors:
Omae scroll
Application Number:
JP2018230645A
Publication Date:
July 11, 2023
Filing Date:
December 10, 2018
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B1/04; B24B1/00; B24B19/16; B24B27/06; H01L21/304
Domestic Patent References:
| JP2002336775A | ||||
| JP2006123066A | ||||
| JP6218985A | ||||
| JP64016362A |
Foreign References:
| WO2008013282A1 |
Attorney, Agent or Firm:
Atago Patent Attorneys Office
Naozumi Ono
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko
Naozumi Ono
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko
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