FINE VACUUM CONTAINER AND ITS MANUFACTURE

Title:

FINE VACUUM CONTAINER AND ITS MANUFACTURE

Document Type and Number:

Japanese Patent JP2000124470

Kind Code:

A

Abstract:

To obtain a fine vacuum container which can realize high vacuum degree.

A fine vacuum container 17 has a Ti film 21 which seals a space part 15. The Ti film 21 has a function to suck H2O and O2 remaining in the space part 15. Therefore, after vacuum sealing, even if H2O, O2 remain in the space part 15, the Ti film 21 adsorbs H2O, O2. Therefore, vacuum degree of the fine vacuum container 17 is high.

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Inventors:

KAGEYAMA YASUYUKI
TSUCHIYA TOMOYOSHI
FUNABASHI HIROBUMI
SAKATA JIRO

Application Number:

JP30636098A

Publication Date:

April 28, 2000

Filing Date:

October 13, 1998

Export Citation:

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Assignee:

TOYOTA CENTRAL RES & DEV

International Classes:

H01L21/306; B81B1/00; B81C1/00; F16J13/00; G01L9/00; G01L9/04; G01L19/14; H01L29/84; (IPC1-7): H01L29/84; F16J13/00; G01L9/04; G01L19/14; H01L21/306

Attorney, Agent or Firm:

Fuse Yukio (2 outside)

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