To provide an elastomer valve structure capable of being made to thin thickness, being operated by small force and being relatively easily manufactured as compared with a silicon substrate process, and a pumping system using it.
A second flow channel 32 superposed so as to be perpendicular to a first flow channel 30 is formed in an elastomer block. A membrane 25 for forming an apex part of the first flow channel 30 separated the two flow channels and simultaneously forms a bottom part of the second flow channel 32 in addition to formation of the apex part of the first flow channel 30. The membrane 25 repeats downward deflection and returning by varying a pressure of the second flow channel 32. Thereby, the first flow channel 30 constitutes a valve action system of linear action.
CHOU HOU-PU
THORSEN TODD A
SCHERER AXEL
QUAKE STEPHEN R
