To provide an elastomer valve structure capable of being formed in a lower profile, operable with small force, and relatively easier to manufacture than a silicon substrate process, and to provide a pumping system using the same.
A second flow channel 32 which is laminated perpendicular to a first flow channel 30 is formed in an elastomer block. A film 25 forming the top of the first flow channel 30 separates two flow channels from each other to form the bottom of the second flow channel 32 which is the top of the first flow channel 30. With a pressure fluctuation in the second flow channel 32, the film 25 is repetitively deformed downward and restored. Thereby, the first flow channel 30 constitutes a valve operation system having linear operation.
CHOU HOU-PU
THORSEN TODD A
SCHERER AXEL
QUAKE STEPHEN R
