Title:
FINELY MOVING MECHANISM
Document Type and Number:
Japanese Patent JPS58182882
Kind Code:
A
Abstract:
PURPOSE:To enable to provide relatively long stroke and to improve resolution and stability of a finely moving mechanism which utilizes an integral elastic hinge used for manufacturing semiconductor related parts by providing a fixing mechanism for holding an article to be finely moved. CONSTITUTION:An electrostatic chuck 4 of a fixing mechanism has an electrode 4a and insulating layers 4b, 4c. A power source 6 is connected through a switch 5 between the electrode 4a and a substrate 2, thereby adsorbing and fixing the unit 1a to be finely moved and providing high position stability at the unit 1a, and even if a drive unit 3 slightly moves, the displacement can be absorbed by the elastic deformation in the course, and the unit 1a to be finely moved of the final stage is not moved.
Inventors:
SUGIHARA KAZUYOSHI
TOUJIYOU TOORU
TOUJIYOU TOORU
Application Number:
JP6659982A
Publication Date:
October 25, 1983
Filing Date:
April 21, 1982
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L21/68; F16H49/00; H01L41/09; (IPC1-7): F16H49/00; H01L21/68; H01L41/08
Attorney, Agent or Firm:
Takehiko Suzue