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Patent Searching and Data


Title:
FINELY SHAPED COMPONENT AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2003033919
Kind Code:
A
Abstract:

To provide a finely shaped component, which has a fine uneven pattern and can be used, for example, as a stamper for use in the molding of an optical component such as a diffraction grating and a polariscope or an original plate for forming the stamper, and a manufacturing method for the finely shaped component.

A top part of a supporting base board 11 is plated with a plurality of types of thin films 32, different in easiness of etching or plating, in an alternating manner, so that a laminated body 31 of the thin films 32 can be formed; and the laminated body 31 is cut off in a direction crossing the thin film 32, so as to be formed into preferably strip-shaped cut pieces 33. which are rearranged to form a laminated surface on which edges of the thin films 32 are exposed in a laminated manner. The laminated surface is etched or plated to form a surface having fine irregularities. Thus, the finely shaped component, which can be used, for example, as the stamper or the original plate for forming the stamper, is obtained.


Inventors:
FURUKAWA MASAHARU
YOKOMORI NORIHARU
KANNO TOSHIYUKI
TANAKA HIDEYUKI
KOBAYASHI TAKESHI
Application Number:
JP2001224667A
Publication Date:
February 04, 2003
Filing Date:
July 25, 2001
Export Citation:
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Assignee:
FUJI ELECTRIC CO LTD
International Classes:
G02B5/18; B29C33/38; B29C59/02; G02B5/30; B29L11/00; (IPC1-7): B29C33/38; B29C59/02; G02B5/18; G02B5/30
Attorney, Agent or Firm:
Shigeru Matsui