To provide a method capable of controlling precisely easily a distance between a probe and workpiece and a working amount in a finely working method to bring the probe having the fine tip close to the workpiece in electrolytic solution for generating an electrochemical reaction between both probe and workpiece.
An electrochemical cell is constituted by the quartet electrode system of a probe 1, warkpiece 2, reference electrode 10 and external electrode 11. The potential of the probe 1 and workpiece 2 is set to the potential causing no electrochemical reaction to control the Z axis position of the probe 1 so that tunnel current flowing between the workpiece 2 and probe 1 is fixed. The rugged shape and inclination of the warkpiece 2 are stored while the probe 1 is moved on a working line. The electrochemical cell is reconstituted into a triple electrode system of the reference electrode 10, and the probe 1 is moved again on the working line while the Z axis position of the probe 1 is controlled to the stored position. At the same time, the workpiece is worked with the electrochemical reaction on the working line by applying voltage across the probe 1 and workpiece 2.
SAKUHARA TOSHIHIKO
ATAKA TATSUAKI
