Title:
FIRING APPARATUS OF ELECTRONIC COMPONENT
Document Type and Number:
Japanese Patent JP2000088468
Kind Code:
A
Abstract:
To control atmosphere in a firing space stably for a long period in a firing apparatus of an electronic component wherein the firing space is formed by fixing a furnace body to a stage with a sealing material interposed.
In a firing apparatus wherein a firing space A is formed by fixing a furnace body 3 to a stage 2 with a sealing material 4 interposed and atmosphere is controlled by supplying atmosphere gas into the firing space A from a gas supply port 3c, a passage forming means constituted of an annular member 9 is constructed for forming a passage C which covers the part of the sealing material 4 exposed outside the firing space A, and the gas of the same kind as the atmosphere gas is supplied to the passage C.
Inventors:
KAWAHARA TOSHINORI
NISHIYAMA TOSHIKI
YONEDA YASUNOBU
IKEFUCHI TERUKI
NISHIYAMA TOSHIKI
YONEDA YASUNOBU
IKEFUCHI TERUKI
Application Number:
JP26491398A
Publication Date:
March 31, 2000
Filing Date:
September 18, 1998
Export Citation:
Assignee:
MURATA MANUFACTURING CO
International Classes:
C04B35/64; F27B17/00; (IPC1-7): F27B17/00; C04B35/64
Attorney, Agent or Firm:
Miyazaki Main Tax
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