To provide a batch-type firing furnace for electronic components for firing the electronic components which emits binder gas during firing, and its furnace pressure control method.
A ceiling part 2 of a firing furnace body 1 is provided with an exhaust duct 3 for emitting exhaust gas comprising a damper mechanism 5 for adjusting gas flow rate and a connection duct 4 communicating to a heat exchanger 7 so as to form a circulation passage 8 for returning the gas cooled by the heat exchanger 7 to the firing furnace body 1. The circulation passage 8 is provided with a furnace pressure controller 9. In the method for controlling furnace pressure of the firing furnace, inflow of the exhaust gas to the circulation passage is stopped to carry out the furnace pressure control by only emission from the exhaust duct, from starting to completion of debindering processing. Then, after the completion of debindering processing, inflow of the exhaust gas to the exhaust duct is stopped to carry out the furnace pressure control by only the circulation of the circulation passage.
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| JP2008039376A | 2008-02-21 | |||
| JP2008002766A | 2008-01-10 | |||
| JPH07239186A | 1995-09-12 | |||
| JP2005188869A | 2005-07-14 | |||
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| JP2004231463A | 2004-08-19 | |||
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| JP2008002766A | 2008-01-10 | |||
| JPH07239186A | 1995-09-12 |
Fumio Yamamoto
Yukine Sekine