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Patent Searching and Data


Title:
FITTING SYSTEM FOR OPTICAL PELLICLE
Document Type and Number:
Japanese Patent JPH10228100
Kind Code:
A
Abstract:

To provide the improved system for fitting an independent pellicle film to a pellicle frame.

This system has a method for assembling an optical pellicle 10 having a pellicle frame 12 and a pellicle film 14. By this method, an adhesive 19 is applied to the pellicle frame first and a solvent in the adhesive 19 vaporizes. In the step for making the solvent vaporize, the pellicle frame 12 coated with the adhesive 19 is heated normally at high temperature. Then the pellicle frame 14 is arranged on the pellicle frame coated with the adhesive 19 and the pellicle film is bonded to the pellicle frame 12 by using a laser. After the pellicle film 14 is fitted to the pellicle frame 12, the outside edge of the pellicle film 14 is irradiated with laser light to cut an excessive film away.


Inventors:
YEN YUNG-TSAI
BIH QOANG RUNG
Application Number:
JP34132797A
Publication Date:
August 25, 1998
Filing Date:
December 11, 1997
Export Citation:
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Assignee:
MICRO LITHOGRAPHY INC
International Classes:
B23K26/36; B29C65/16; B29C65/48; G03F1/64; H01L21/027; (IPC1-7): G03F1/14; H01L21/027
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)