To provide the improved system for fitting an independent pellicle film to a pellicle frame.
This system has a method for assembling an optical pellicle 10 having a pellicle frame 12 and a pellicle film 14. By this method, an adhesive 19 is applied to the pellicle frame first and a solvent in the adhesive 19 vaporizes. In the step for making the solvent vaporize, the pellicle frame 12 coated with the adhesive 19 is heated normally at high temperature. Then the pellicle frame 14 is arranged on the pellicle frame coated with the adhesive 19 and the pellicle film is bonded to the pellicle frame 12 by using a laser. After the pellicle film 14 is fitted to the pellicle frame 12, the outside edge of the pellicle film 14 is irradiated with laser light to cut an excessive film away.
JPH0757427 | [Title of Invention] Laser Cutting Machine |
WO/2013/028623 | HIGH SPEED LASER SCANNING SYSTEM FOR SILICON SOLAR CELL FABRICATION |
WO/2010/026242 | METHOD AND DEVICE FOR TREATING A SURFACE |
BIH QOANG RUNG
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