FIXED ABRASIVE POLISHING TOOL, AND METHOD FOR MANUFACTURING THE SAME

Title:

FIXED ABRASIVE POLISHING TOOL, AND METHOD FOR MANUFACTURING THE SAME

Document Type and Number:

Japanese Patent JP2004074330

Kind Code:

A

Abstract:

To provide a fixed abrasive polishing tool in which free abrasives separated from fixed abrasives are favorably dispersed to increase the number of acting abrasives to a subject surface to be polished for achieving sufficient polishing speed and sharp polishing characteristics.

This fixed abrasive polishing tool is composed of abrasives 11 and resin 15, and surface-treated with coupling agent. A combination of the coupling agent with the resin comprises a combination of organofunctional groups in the coupling agent with the resin that is naturally hard to be coupled with them. In the fixed abrasive polishing tool, composed of the abrasives and the resin, the resin is core shell type composite high polymer 13 comprising the abrasives as nuclei, and high polymer polymerized and coated around the abrasives.

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Inventors:

HIROKAWA KAZUTO
AKATSUKA TOMOHIKO
KODERA AKIRA

Application Number:

JP2002235976A

Publication Date:

March 11, 2004

Filing Date:

August 13, 2002

Export Citation:

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Assignee:

EBARA CORP

International Classes:

B24B7/22; B24D3/00; B24D3/28; B24D3/34; B24D7/02; (IPC1-7): B24D3/28; B24D3/00

Attorney, Agent or Firm:

Isamu Watanabe
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori

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