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Title:
偏心装置を備えた固定レール
Document Type and Number:
Japanese Patent JP7092912
Kind Code:
B2
Abstract:
To provide a fixed rail for a vacuum system which attracts attention by virtue of high operability and flexible usage.SOLUTION: A fixed rail (22) as the fixed rail used for fixing a flange portion of a first component of a vacuum system onto a surface portion of a second component of the vacuum system includes a guide portion formed for co-operating with the side opposite to the surface portion of the flange portion, a fixed portion formed for fixing the fixed rail to a second vacuum component such that the flange portion can be introduced, in particular, can be inserted between the guide portion and the surface portion, and an eccentric device which can rotate between a clamped state and a released state, operates a holding force directed to a direction of the surface portion onto the flange portion in such a clamped state via at least one operation face, is set up in order to release the flange portion in such a released state and is supported so as to be rotatable.SELECTED DRAWING: Figure 1

Inventors:
Martin Rose
Michael Schweighoefer
Application Number:
JP2021035562A
Publication Date:
June 28, 2022
Filing Date:
March 05, 2021
Export Citation:
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Assignee:
Pfeiffer Vacuum Technology Actien Gezel Shaft
International Classes:
F04B37/16; F04D19/04
Domestic Patent References:
JP2010261465A
Foreign References:
WO2015019046A1
Attorney, Agent or Firm:
Esaki Mitsufumi
Blacksmith Minoru Sawa
Shinsuke Nakamura
Tomoko Suzuki
Ishida Taisei