FIXING STRUCTURE OF ROTOR SHAFT AND ROTOR AND TURBO-MOLECULAR PUMP HAVING THE FIXING STRUCTURE

Title:

FIXING STRUCTURE OF ROTOR SHAFT AND ROTOR AND TURBO-MOLECULAR PUMP HAVING THE FIXING STRUCTURE

Document Type and Number:

Japanese Patent JP2006194083

Kind Code:

A

Abstract:

To provide a fixing structure of a rotor shaft and a rotor capable of keeping rotation balance of the rotor shaft and the rotor to prevent oscillation by stabilizing a contact condition of an contact surfaces of the rotor shaft and the rotor and to provide a turbo-molecular pump having the fixing structure.

A fastening surface 257 on a rotor shaft 213 side in contact with the rotor 103 is concentrically formed in an outer peripheral portion on an upper surface of a fastening portion 253. A spot facing portion 259 whose upper surface is recessed more than the fastening surface 257 is formed at the inner periphery of the fastening surface 257. For this reason, when the rotor shaft 213 is fastened to the rotor 103, a clearance 265 is formed between an contact surface 187 of the rotor 103 and it by depth of the spot facing portion 259 in a portion in which the spot facing portion 259 is formed.

Inventors:

MAEJIMA YASUSHI
INAYOSHI YUTAKA
KAWANISHI SHINJI
SAKURAI ISAO
SUDA HIROYUKI
AKIMOTO TAKESHI

Application Number:

JP2003323378A

Publication Date:

July 27, 2006

Filing Date:

September 16, 2003

Export Citation:

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Assignee:

BOC EDWARDS KK

International Classes:

F04D19/04; F04D29/056; F04D29/26; F04D29/32; F04D29/64

Attorney, Agent or Firm:

Masatoshi Shiina

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