Title:
FLANGE MOUNT-TYPE HOT CATHODE IONIZATION VACUUM GAUGE
Document Type and Number:
Japanese Patent JP3400885
Kind Code:
B2
Abstract:
PURPOSE: To provide a flange mount-type hot cathode ionization vacuum gauge of long life which can measure stably even under a high pressure or even when performing degassing frequently and can be made compact.
CONSTITUTION: The gauge has a filament 1 for thermionic emission, a grid 2 for catching electrons, and an ion collector 3, and it is mounted on a flange 4. A guard electrode 6 is arranged to block electrons emitted from the filament 1 so that they cannot reach a grid terminal insulator 22 set at a side face of a grid terminal 21 to insulate the grid terminal 21 having the grid 2 at the front end from the flange 4. The guard electrode 6 is in touch with a collector shield 33 disposed in the periphery of the ion collector 3 and a collector terminal insulator 32. The collector shield 33 is grounded via the flange 4.
Inventors:
Hoichi Tamura
Akiko Yoshimura
Akiko Yoshimura
Application Number:
JP7439995A
Publication Date:
April 28, 2003
Filing Date:
March 06, 1995
Export Citation:
Assignee:
ANELVA Co., Ltd.
International Classes:
G01L21/32; H01J41/04; (IPC1-7): G01L21/32; H01J41/04
Domestic Patent References:
| JP3154836A | ||||
| JP62192648A | ||||
| JP5991330A | ||||
| JP55156825A | ||||
| JP5026314B1 |
Attorney, Agent or Firm:
Koichi Hotate
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