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Patent Searching and Data


Title:
FLAT DISCHARGE TUBE
Document Type and Number:
Japanese Patent JP2007026677
Kind Code:
A
Abstract:

To provide a flat discharge tube capable of raising exhaust efficiency of a vacuum exhaust of air and air supply efficiency of discharge gas in one in which a discharge space is sectioned into a plurality of cells by dielectric ribs.

In the flat discharge tube 1, a plurality of the dielectric ribs 5 are interposed between both glass substrates 2, 3 as first and second dielectric flat plates forming the discharge space 6, and both ends of these dielectric ribs 5 in a longitudinal direction are connected with an inner wall side face of a frame glass 4. By this, the discharge space 6 is sectioned into a plurality of cells 6a to 6e. Groove parts 5b in the plural number are installed at a part of the upper face 5a of the plurality of dielectric ribs 5, and the cells 6a to 6e between the respective discharge sections are made communicated.


Inventors:
NODA MAKOTO
Application Number:
JP2005202377A
Publication Date:
February 01, 2007
Filing Date:
July 12, 2005
Export Citation:
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Assignee:
LECIP CORP
International Classes:
H01J61/30; H01J65/00