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Patent Searching and Data


Title:
FLAT INDUCTOR AND MANUFACTURE THEREOF, AND METHOD FOR FORMING FLAT COIL PATTERN
Document Type and Number:
Japanese Patent JPH11251143
Kind Code:
A
Abstract:

To provide a flat inductor wherein true interval between a plated conductor coils is finer, related to a flat inductor (thin-film inductor).

A lower part magnetic film 31 and a lower part inter-layer insulating film 32 formed sequentially on a substrate 30, and first and second plated conductor coils 36 and 46 which are, formed on the lower part inter-layer insulating film 32, mutually running in spiral while insulated from each other with a silicon dioxide film 38 are provided. One end 41 of the first and second plated conductor coils 36 and 46 is connected to one terminal in common, the other end 42 is connected to the other terminal in common, and the first and second conductor coils 38 and 46 are connected in parallel between one terminal and the other terminal.


Inventors:
FUJITA HIROSHI
Application Number:
JP4941198A
Publication Date:
September 17, 1999
Filing Date:
March 02, 1998
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01F41/04; H01F17/00; (IPC1-7): H01F17/00; H01F41/04
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)