Title:
FLAT MAGNETIC ELEMENT AND AMORPHOUS MAGNETIC THIN FILM
Document Type and Number:
Japanese Patent JP3688732
Kind Code:
B2
Abstract:
PURPOSE: To provide a soft magnetic thin film of a flat magnetic element permitting miniaturization and higher performance, by realizing coexistence of both highly saturated magnetization and high resistivity and facilitating the acquisition of high frequency magnetic permeability by excitation of hard axis.
CONSTITUTION: This is a flat magnetic element having an amorphous magnetic thin film and a flat coil. The amorphous magnetic thin film possess, as at least part of a thin film forming region, a microstructure constituted by a first amorphous phase 1 bearing the magnetism including at least one of the iron and cobalt and a second amorphous phase 2 arranged in the vicinities of the first amorphous phase 1 and containing boron and 4B group element and has uniaxial magnetic anisotrophy in plane. The amorphous magnetic thin film has a composition that can be expressed essentially by a chemical formula such as (Fe1-xCox)1-x(B1-zXz)y (in the formula, X has at least one kind of element selected from 4B group elements 0-<x≤0.5, 0.06<y<0.5 (specially 0.10<y<0.33) and 0.05< z<0.5).
Inventors:
Hiroshi Tomita
Tetsuo Inoue
Hiromi Fukuya
Toshiro Sato
Tetsuhiko Mizoguchi
Tetsuo Inoue
Hiromi Fukuya
Toshiro Sato
Tetsuhiko Mizoguchi
Application Number:
JP3916794A
Publication Date:
August 31, 2005
Filing Date:
February 14, 1994
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
C22C45/00; H01F10/12; H01F10/13; H01F10/16; H01F19/00; H01F30/10; (IPC1-7): H01F10/16; C22C45/02; H01F19/00
Domestic Patent References:
| JP54122000A | ||||
| JP53133505A | ||||
| JP63119209A | ||||
| JP59200748A | ||||
| JP2262307A | ||||
| JP3106003A | ||||
| JP4139805A |
Attorney, Agent or Firm:
Saichi Suyama