Title:
フラットパネルディスプレイ製造装置
Document Type and Number:
Japanese Patent JP7209318
Kind Code:
B2
Abstract:
This invention provides a flat panel display manufacturing device having an electricity removing device suitable for removing electricity of a glass substrate under high vacuum. A flat panel display manufacturing device ID of this invention includes: a processing chamber 1 in which a processing is applied to a glass substrate S; and a carrying path 3 forming a carrying in/out passage for carrying the glass substrate S into or out from the processing chamber 1. Wherein, the processing chamber 1 and the carrying path 3 are under vacuum atmosphere, and an outer wall face of a vacuum vessel for forming the carrying path 3 to which an electricity removing device O is provided for releasing electron toward inner side of the vacuum vessel for removing electricity of the glass substrate S.
Inventors:
Gen Takahashi
Yuichi Nagao
Junichi Tachimichi
Yu Inoue
Yuichi Nagao
Junichi Tachimichi
Yu Inoue
Application Number:
JP2017224395A
Publication Date:
January 20, 2023
Filing Date:
November 22, 2017
Export Citation:
Assignee:
Nissin Ion Equipment Co., Ltd.
International Classes:
H05F3/06; H01L21/677
Domestic Patent References:
| JP2001217301A | ||||
| JP2004241420A | ||||
| JP2008218286A | ||||
| JP10144666A |
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