To provide a flat panel manufacturing apparatus that can minimize the entire process time for depositing an organic thin film onto a substrate.
The flat panel manufacturing apparatus includes: a plurality of process chambers 110 in which at least two substrates 10 are processed; a transfer chamber 120 that is provided among the plurality of the process chambers along a first direction L1 and is provided with a transfer robot 123 that supplies untreated substrates to the process chamber and takes out processed substrates from the process chamber while moving reciprocally and linearly along a second direction L2 crossing orthogonally to the first direction; a loading chamber 130 that is connected with one side of the transfer chamber and houses substrates to be supplied; and an unloading chamber 140 that is connected with the other side of the transfer chamber and houses discharged substrates. Within the process chamber, a process gas is deposited to either one of substrates along the second direction, and remaining substrates are subjected to transfer and positional arrangement.
CHO WHANG SIN
AHN WOO JUNG
SONG KI CHUL
| JP2010086956A | 2010-04-15 | |||
| JP2011068980A | 2011-04-07 | |||
| JP2006002226A | 2006-01-05 |
| WO2010032910A1 | 2010-03-25 |
Kana Ichikawa