PURPOSE: To prevent defects from being produced on the surface of a substrate by irradiating a solid surface with gas cluster ions being a massive group of atoms or molecules of a substance being gaseous at a normal temperature and pressure.
CONSTITUTION: By using an oxide, a nitride, a carbide, a rear gas substance, and a mixed gaseous substance obtained by mixing them by a proper ratio, and so on, a cluster of gases of these substances are formed. A gas cluster ion beam obtained by ionization on irradiating this gas cluster with electrons under a condition of an accelerating voltage of 10kV irradiates solid surfaces, selecting a beam of specific size as occasion demands. Consequently, it becomes possible to flatten and cleanse the surfaces of boards under a lower temperature condition without damaging the surfaces.
HARADA MITSUAKI
DOI ATSUMASA
YAMADA AKIRA
SANYO ELECTRIC CO