Title:
FLAW INSPECTION DEVICE OF IMAGE, VISUAL EXAMINATION DEVICE AND FLAW INSPECTION METHOD OF IMAGE
Document Type and Number:
Japanese Patent JP2007003459
Kind Code:
A
Abstract:
To provide a flaw inspection device of an image capable of discriminating between true flaw, which shows an existing flaw, and a false flaw formed by background noise in a case that a pattern to be inspected exceeds the resolving limit of an imaging device and the contrast of an inspection image lowers, a visual examination device and a flaw inspection method of the image.
It is discriminated that the flaw detected from the gray level difference signal of two images to be inspected is either one of the true flaw and the false flaw, corresponding to the S/N ratio of the gray level value signal of the original image to be inspected used in detection.
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Inventors:
KATSUKI YUZO
Application Number:
JP2005186414A
Publication Date:
January 11, 2007
Filing Date:
June 27, 2005
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
G01N21/956; G01B11/30; G06T1/00; H01L21/66
Domestic Patent References:
| JP2002022421A | 2002-01-23 | |||
| JP2004177397A | 2004-06-24 | |||
| JP2996263B2 | 1999-12-27 | |||
| JPH04107946A | 1992-04-09 | |||
| JPH10160681A | 1998-06-19 | |||
| JPH0989802A | 1997-04-04 | |||
| JPH08189905A | 1996-07-23 | |||
| JPH0989801A | 1997-04-04 |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tetsuro Shimada
Ryu Kobayashi
Shimichi Akihisa
Masaya Nishiyama
Jun Tsuruta
Tetsuro Shimada
Ryu Kobayashi
Shimichi Akihisa
Masaya Nishiyama
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