Title:
浮上搬送装置および浮上搬送方法
Document Type and Number:
Japanese Patent JP6076606
Kind Code:
B2
Inventors:
Takahiro Yasuda
Kouichi Kakuda
Toshiyuki Ikeda
Hideo Ozawa
Kouichi Kakuda
Toshiyuki Ikeda
Hideo Ozawa
Application Number:
JP2012029473A
Publication Date:
February 08, 2017
Filing Date:
February 14, 2012
Export Citation:
Assignee:
OILES CORPORATION
International Classes:
B65G51/03; B65G49/06; H01L21/677
Domestic Patent References:
| JP2011519796A | ||||
| JP2007324382A | ||||
| JP2010083591A | ||||
| JP2011207552A |
Foreign References:
| WO2010058689A1 | ||||
| WO2009119377A1 |
Attorney, Agent or Firm:
Mitsuhiro Ozeki