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Title:
FLOATING TRANSFER-TYPE HEATING DEVICE
Document Type and Number:
Japanese Patent JP2012248755
Kind Code:
A
Abstract:

To provide a floating transfer-type heating device capable of transferring a substrate while heating it, without causing uneven drying of a coating film.

A floating transfer-type heating device comprises: a diaphragm part 2 which causes a substrate to float by ultrasonic vibrations; a heater part 3 which heats the diaphragm part; an ultrasonic wave generation part 4 which applies ultrasonic vibrations to the diaphragm part; and a transfer part 5 which supports an end of the substrate and transfers the substrate in a direction perpendicular to a floating direction of the substrate. The heater part 3 is arranged, at a predetermined distance from the diaphragm part 2, on the rear side of a surface of the diaphragm part 2 over which the substrate is floated. The dimension of the diaphragm part 2 in a direction orthogonal to a transfer direction of the substrate is larger than the dimension of a substrate W in the same direction. When the diaphragm part 2 is heated by the heater part 3, the entire surface of the substrate W being floated and transferred is heated by the diaphragm part 2.


Inventors:
MIYAJIMA YUYA
OKUDA DAISUKE
OKAMOTO SHUNICHI
UCHIGATA TOMOO
Application Number:
JP2011120762A
Publication Date:
December 13, 2012
Filing Date:
May 30, 2011
Export Citation:
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Assignee:
TORAY ENG CO LTD
International Classes:
H01L21/677; F26B15/00; B05C9/14
Domestic Patent References:
JP2006205064A2006-08-10
JP2008016543A2008-01-24
JP2008302320A2008-12-18
JPH07242317A1995-09-19
JP2003128228A2003-05-08
JP2010021396A2010-01-28
JPH1140645A1999-02-12
Foreign References:
WO2009145817A12009-12-03