Title:
FLOW CHARACTERISTIC MEASURING ELEMENT AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP3971920
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a flow characteristic measuring element and its manufacturing method capable of reducing a lead part resistance, and a measurement error caused by the lead part resistance, and measuring highly accurately, and requiring little power consumption.
SOLUTION: This flow characteristic measuring element is equipped with a substrate 11, a space part 12 formed on the substrate, an insulating film 13 laminated on the substrate, and a heater 141 laminated on the insulating film 13. In the element, the value X is 0.01 or less, which is determined from the expression {α/(1-α)}×(ΔTb/ΔTa) by calculation by using (1) the ratio α of a resistance value of a heater lead part positioned on the furthermore heater temperature-raising part side than a bonding wire connection position 15, to a resistance value of the whole heater, at the non- current-carrying time, (2) the difference ΔTa between a heater average temperature measured between the bonding wire connection position and a measuring atmospheric temperature, at the measuring atmosphere non-fluidizing and current-carrying time, and (3) the difference ΔTb between a substrate average temperature and the measuring atmospheric temperature, at the measuring atmosphere non-fluidizing and current- carrying time.
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Inventors:
Masatoshi Ueki
Takio Kojima
Yoshihiko Yukimura
Koichi Igawa
Yoshinori Tsujimura
Takafumi Oshima
Takio Kojima
Yoshihiko Yukimura
Koichi Igawa
Yoshinori Tsujimura
Takafumi Oshima
Application Number:
JP2001370586A
Publication Date:
September 05, 2007
Filing Date:
December 04, 2001
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
G01F1/692; (IPC1-7): G01F1/692
Domestic Patent References:
| JP1308922A | ||||
| JP9304142A | ||||
| JP11326001A | ||||
| JP8313318A |
Attorney, Agent or Firm:
Kiyoshi Kojima