PURPOSE: To transfer pulverous particles formed by focusing a gaseous raw material in the form of a uniform supersonic beam by providing a reducing and expanding nozzle made of an electrical insulator to a flow passage, thereby constituting a flow control device for pulverous particle flow.
CONSTITUTION: A pressure difference is generated between an upper stream chamber 3 and a lower stream chamber 4 when the inside of the chamber 4 is evacuated by a vacuum pump 5 while a carrier gas dispersed and incorporated therein with the gaseous raw material is supplied into the chamber 3. The supplied carrier gas contg. the gaseous raw material, therefore, flows from the chamber 3 into the chamber 4 by swirling in the reducing and expanding nozzle 1. Since the reducing and expanding nozzle 1 is made of the electrical insulator, microwave discharge is generated between a microwave electrode 9 and the reducing and expanding nozzle 1 by positioning the microwave electrode 9 in proximity to the nozzle 1.
ANDO KENJI
MASAKI TATSUO
SUGATA MASAO
OSABE KUNIJI
KAMIYA OSAMU
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