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Title:
FLOW CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2004251366
Kind Code:
A
Abstract:

To provide a flow control device capable of controlling the flow rate with high accuracy without generating abnormal noise by employing a novel valve mechanism and a novel valve driving mechanism.

In the flow control device 1, a stepping motor 30 is used for a drive source for a valve element 6. A valve element 61 for large flow control, a ring-shaped seal member 62 with a valve hole 620 formed therein, a valve element 63 for small flow control, and a coil spring 64 are constituted on the valve element 6. In a small flow rate area, the opening of the valve hole 620 is adjusted by the valve element 63 for small flow control while the seal member 6 is tightly attached to a circumferential wall 50 of an opening part 5. In a large flow rate area, the seal member 62 is separated from the circumferential wall 50, and the opening of the opening part 5 is adjusted by the valve element 61 for large flow control.


Inventors:
NORITAKE SEIICHIRO
WADA RYUHEI
Application Number:
JP2003042060A
Publication Date:
September 09, 2004
Filing Date:
February 20, 2003
Export Citation:
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Assignee:
SANKYO SEIKI SEISAKUSHO KK
International Classes:
F16K31/04; F16K1/20; F16K1/52; F16K1/54; F16K39/02; (IPC1-7): F16K31/04
Attorney, Agent or Firm:
Shiro Yokozawa