To provide a flow control device capable of controlling the flow rate with high accuracy without generating abnormal noise by employing a novel valve mechanism and a novel valve driving mechanism.
In the flow control device 1, a stepping motor 30 is used for a drive source for a valve element 6. A valve element 61 for large flow control, a ring-shaped seal member 62 with a valve hole 620 formed therein, a valve element 63 for small flow control, and a coil spring 64 are constituted on the valve element 6. In a small flow rate area, the opening of the valve hole 620 is adjusted by the valve element 63 for small flow control while the seal member 6 is tightly attached to a circumferential wall 50 of an opening part 5. In a large flow rate area, the seal member 62 is separated from the circumferential wall 50, and the opening of the opening part 5 is adjusted by the valve element 61 for large flow control.
WADA RYUHEI