Title:
流量コントローラ、流量コントローラの部品および関連方法
Document Type and Number:
Japanese Patent JP3717520
Kind Code:
B2
Abstract:
A mass fluid flow controller has a valve which is controlled by a controller rod structure which is substantially pivotally mounted on a metallic diaphragm which stretches and unstretches with the movement of the rod structure. The actuation of the rod structure is by the expansion and contraction of an actuator wire which is heated for the expansion and allowed to cool for the contraction. The primary fluid flow path through the controller is straight. A sensor conduit, providing a parallel sensor fluid flow path, is connected in position using metallic sealer members which extend in openings to the primary fluid flow path and which are rounded along the direction through such openings. The pressure drop, along the primary fluid flow path, to create flow through the sensor conduit, is provided by a fluid flow restrictor having a core and having lengths of wire along the core which are squeezed between the core and a tapered fluid flow path wall in the vicinity of the sensor conduit input and output connections. A spherical or a conical shape may be used for the form of the core. A valve seat bushing is mounted in pipe structure providing the primary fluid flow path by applying a force against an end surface of the bushing, with movement of the bushing blocked, in order to deform the end surface, push the outer wall of the bushing against the inner wall of the pipe structure, and fix the bushing in the pipe structure. In the relationship between the controller rod structure and a ball which acts as a gate-member for the valve, an elongated stem rod having a sleeve about it may be used in fixing the ball to the controller rod structure. The stem rod may be mounted by fixing it to the elongated sleeve, a distance from the gate-member side of the controller rod structure that is substantially greater than the distance of the position of the ball from the gate-member side of the controller rod structure.
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Inventors:
Mad, Daniel Tee.
Duong, high
Duong, high
Application Number:
JP52098096A
Publication Date:
November 16, 2005
Filing Date:
November 20, 1995
Export Citation:
Assignee:
Mykrolis Corporation
International Classes:
B23P11/00; G01F1/684; G01F5/00; G01F15/00; G05D7/06; (IPC1-7): G05D7/06
Domestic Patent References:
| JP54156823U | ||||
| JP60184113U | ||||
| JP3220420A | ||||
| JP6010120A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki