To provide a flow controller capable of carrying out an adjustment of a flow rate of a fluid.
The flow controller 1 has a cylindrical body 2; a flow passage control member 4; an operation member 7; and a support 9. The cylindrical body 2 is provided with a deformable part 12, the flow passage control member 4 is provided with a control groove 15 and the operation member 7 is provided with an urging part 6. The flow passage control member 4 has a loose circular curved surface 10 near a border 20 at a flow passage side of the cylindrical body 2 and the flow passage control member 4. When the deformable part 12 is urged by the urging part 6, a gap is hardly generated by making the cylindrical body 2 and the flow passage control member 4 coincident with each other except for an adjustment flow passage. When an inner periphery length of the cylindrical body 2 is set to a shorter length than a periphery length of a cross section of the flow passage control member except for a control groove, a gap is not further generated.
MATSUMOTO ATSUSHI
JPH01156363U | 1989-10-27 | |||
JPH05196155A | 1993-08-06 |
DE19712908A1 | 1997-11-06 | |||
US4065093A | 1977-12-27 | |||
WO1999030770A1 | 1999-06-24 |