Title:
流量調節弁付き流量検出器
Document Type and Number:
Japanese Patent JP4042190
Kind Code:
B2
Abstract:
A flow detector comprises a body 1 having a fluid channel 2 penetrating its interior and having a detection section 11 of a flow sensor 10 disposed in the fluid channel. An input and an output block 3 and 5 have respectively an input and an output channel 4 and 6 in communication with the fluid channel 2 in the detector body 1. A flow control valve 21 is provided in the output block 5. The detector body 1 and each of the input and output blocks 3 and 5 are joined together via seal members 16a and 16c that seal the channels 2, 4 and 6 provided in the body and blocks and are fixedly connected at positions separate from said channels using screws. The flow detector can be used in a clean environment (e.g. a semiconductor fabrication apparatus) and is an integrated apparatus that enables the flow to be measured and regulated.
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Inventors:
Shinji Miyazoe
Application Number:
JP36203097A
Publication Date:
February 06, 2008
Filing Date:
December 11, 1997
Export Citation:
Assignee:
SMC Corporation
International Classes:
G01F1/00; G01F1/68; G01F1/32; G01F1/684; G01F15/00; G01F15/18
Domestic Patent References:
| JP5172265A | ||||
| JP9016267A | ||||
| JP2254322A | ||||
| JP3070324U | ||||
| JP2263117A | ||||
| JP8502582A | ||||
| JP6180611A |
Foreign References:
| WO1997041057A1 |
Attorney, Agent or Firm:
Hiroshi Hayashi
Hayashi Naoki
Kotaro Hori
Daisuke Yoshisako
Hayashi Naoki
Kotaro Hori
Daisuke Yoshisako