Title:
テクスチャを施した表面を有するフロー・フォームドチャンバコンポーネント
Document Type and Number:
Japanese Patent JP2009508002
Kind Code:
A
Abstract:
A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.
Inventors:
Abnie Stefan Yee
Betty Anthony
Somers Joseph F
Schweizer Mark O
Dickerson scott
Tyler jennifer
Betty Anthony
Somers Joseph F
Schweizer Mark O
Dickerson scott
Tyler jennifer
Application Number:
JP2008530023A
Publication Date:
February 26, 2009
Filing Date:
September 11, 2006
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C14/00; B21H1/00; H01L21/3065
Attorney, Agent or Firm:
Yoshiaki Anzai