Title:
FLOW MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3297507
Kind Code:
B2
Abstract:
PURPOSE: To improve the flow measuring precision in the low-flow area and precisely measure the flow over the whole flow area by providing pressure adjusting and flow measuring means, and properly setting the pressure.
CONSTITUTION: The outlet pressure of the second pressure regulator 5 is set higher than the outlet pressure of the first pressure regulator 2, the regulator 2 is closed in the low-flow area of gas, and the whole feed gas flows in an orifice tube 7. The pressure difference between the inlet and outlet of the tube 7 is measured with a pressure sensor 8, the relation between the pressure difference and the flow is arithmetically processed in an arithmetic section 9, and the gas flow is measured. The outlet pressure of a flow measuring instrument 6 is controlled by the regulator 5, the pressure sensor 8 can be sealed by the intermediate pressure, the low-flow measuring range is widened, and the measuring precision is improved. When the gas flow is increased into a high-flow area, the outlet pressure of the regulator 5 is reduced, gas passes through the regulators 2, 5 and is fed to a gas apparatus, and the total flow is measured by the measuring instrument 6. Flows in the low and high-flow areas are accumulated in an accumulation section 10.
Inventors:
Toshihiko Suzuki
Tetsuhiko Matsushima
Katsuro Fujimoto
Tetsuhiko Matsushima
Katsuro Fujimoto
Application Number:
JP21292693A
Publication Date:
July 02, 2002
Filing Date:
August 27, 1993
Export Citation:
Assignee:
Yazaki Corporation
International Classes:
G01F1/20; G01F1/00; G01F1/42; G01F7/00; (IPC1-7): G01F7/00; G01F1/00; G01F1/20; G01F1/42
Domestic Patent References:
| JP799340B2 | ||||
| JP778442B2 |
Other References:
【文献】特許2587108(JP,B2)
【文献】特許2637881(JP,B2)
【文献】特許2794366(JP,B2)
【文献】特許2637881(JP,B2)
【文献】特許2794366(JP,B2)
Attorney, Agent or Firm:
Hidekazu Miyoshi (8 outside)