To provide a flow passage block structure having no residence part on a flow passage, capable of replacing gas in a short time.
A first flow passage block 6 is provided with a mounting hole 8, a process gas output flow passage 11, a first port 12, a process gas input flow passage 13, and a purge gas input flow passage 19. A purge valve input flow passage 19 is drilled toward the vicinity of a valve part of a supply valve 2 from a side face opposing to a second flow passage block 7 and is communicated with the process gas output flow passage 11. On the other hand, the second flow passage block 7 is provided with a mounting hole 20, a second port 21, a purge gas output flow passage 25, a purge valve output flow passage 24, a third port 27, and an output flow passage 26. The first and second flow passage blocks 6, 7 are mutually connected to communicate the purge gas input flow passage 19 with the purge valve output flow passage 24 and communicate the process gas output flow passage 11 with a common output flow passage 26 to constitute the flow passage block structure 5.
TAKECHI AKIHIRO
AOYAMA TATSUTO
MIWA TOSHIICHI
INOUE TAKASHI
| JP2001254857A | 2001-09-21 | |||
| JP2001082621A | 2001-03-30 | |||
| JP2001517767A | 2001-10-09 |
Ikuo Yamanaka
Akika Okado