Title:
FLOW RATE CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2017003004
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To prevent or suppress that self-excited vibration is generated in a flow rate control device while making pressure vibration not generated in a backpressure chamber by preventing or suppressing a variation of a volume of the backpressure chamber at the abrupt deflection and deformation of a diaphragm caused by a disturbance.SOLUTION: A flow rate control device 10 comprises: a deflectable and deformable diaphragm 32 which divides an internal chamber 30 of a housing 24 into a discharge chamber 36 and a backpressure chamber 34; a valve seat face 47 formed at the housing 32 which forms the discharge chamber 36; a discharge passage 46 opened at the valve seat face 47 at its one end; and a variable throttle formed of a circulation clearance which is variable between the diaphragm 32 and the valve seat face 47. The housing 24 which forms the backpressure chamber 34 is formed at a deflectable and deformable thin-thickness wall 48, deforms the thin-thickness wall 48 according to an increase/decrease of a volume of the backpressure chamber 34 caused by the deflection and deformation of the diaphragm 32, and prevents or suppresses a variation of the volume of the backpressure chamber 34.SELECTED DRAWING: Figure 2
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Inventors:
HASHIMOTO TAKAAKI
Application Number:
JP2015117761A
Publication Date:
January 05, 2017
Filing Date:
June 10, 2015
Export Citation:
Assignee:
JTEKT CORP
International Classes:
F16K7/07; F16K47/02
Attorney, Agent or Firm:
Okada International Patent Office
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