Title:
FLOW RATE CONTROL DEVICE
Document Type and Number:
Japanese Patent JPS60175885
Kind Code:
A
Abstract:
PURPOSE:To reduce the size of a flow rate control device and to improve closing reliability, by a method wherein a slide valve is driven through control of an ultrasonic vibration motor in response to an output signal from a flow rate sensor. CONSTITUTION:With a set signal provided, a switching circuit 34 discriminates that it is a flow rate increasing signal, a driving circuit 35 is electrically connected to a piezoelectric body 27, and a rotor 30 rotates a rotor 24. Fluid through-holes 22a and 22b are started to communicate with each other, and fluid flows in a flow rate sensor 3 through a fluid outlet 6. The passage of the fluid rotates a vane 15, a flow rate detecting signal is fedback to a control circuit 4a, and an ultrasonic vibration motor 2a is controlled so that a flow rate is regulated to a value responding to a set signal.
Inventors:
MATSUMOTO TOMOHIDE
SHIRAI SHIGERU
NAKAMURA MASAJI
SHIRAI SHIGERU
NAKAMURA MASAJI
Application Number:
JP3081384A
Publication Date:
September 10, 1985
Filing Date:
February 21, 1984
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
F16K31/02; G05D7/06; (IPC1-7): F16K31/06
Attorney, Agent or Firm:
Akira Kobiji (2 outside)