To provide a flow rate sensor in which deterioration in detection sensitivity and destruction of a sensor are prevented by making a sensor mounting section hard to vibrate.
The flow rate sensor includes a sensor chip 10 having, on its surface, a flow rate detection section 10a exposed to an detection object fluid; a fixing unit 30 having an external connection terminal 20 electrically connected to the sensor chip 10; and a sensor mounting section 40 which is projected to a prescribed direction from the fixing unit 30, and in which a storage recess 50 is formed between a portion connected with the fixing unit 30 and a tip end of the projection for storing the sensor chip 10 while exposing the flow rate detection section 10a. In the sensor mounting section 40, with respect to cross sections perpendicular to the projection direction, a cross sectional area closer to the tip end side from the storage recess 50 is made smaller than a cross sectional area closer to the fixing unit 30 side from the storage recess 50.
SUGIKI MIKIO
SATO TAKUYA
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| WO2001088486A1 | 2001-11-22 |