Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
FLOW REGULATING DEVICE OF POROUS STATIC PRESSURE GAS BEARING
Document Type and Number:
Japanese Patent JPH03260417
Kind Code:
A
Abstract:

PURPOSE: To set a gas flow rate uniformly at a predetermined value by selecting an optimum pattern having uniform holes at plural kinds of hole opening rate by previously set program, and applying solvent via mask and this pattern.

CONSTITUTION: When a bearing is set on a mounting frame 8 via a bearing fixing jig, the unit mounted on a shift unit moves horizontally, and keep on descending until it contacts with a stopper which is set in such a way that space of pattern becomes constant on bearing adjusting face at travel end. Next, the flow adjusting section which is mounted to NC robot moves up to the flow adjusting position by the previously set program. A detection pad 45 descends by an air cylinder 43 provided with rotation stopper, passes through an opening of a mask 13 and pattern 11, adheres to bearing face, and measures the gas passage amount. Next, the pad 45 rises by the cylinder 43. Here, the optimum pattern is selected from the pattern 11 by a controller to set to the predetermined gas passage amount set by data and the previously set program.


Inventors:
OSAKI SATOSHI
MIYAZAKI TAKAOMI
Application Number:
JP5667690A
Publication Date:
November 20, 1991
Filing Date:
March 09, 1990
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CANON KK
International Classes:
F16C32/06; (IPC1-7): F16C32/06
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)



 
Previous Patent: GAS BEARING

Next Patent: HEAT ACCUMULATION TYPE AIR CONDITIONER